Fluidic-mediated self-assembly for hybrid functional micro/nanosystems
Helmut Knapp CSEM
Alcherio Martinoli EPFL
Bradley Nelson ETHZ
Laurent Sciboz Icare research institute
Nicholas Spencer ETHZ
Project Description
The goal of the project is to develop a novel manufacturing method capable of assembling a large number of pre-fabricated smart MEMS devices into more complex systems by using liquid media. An additional goal is to trap liquid inside the assembled MEMS that can be released upon an external trigger signal. These devices may find applications in environmental engineering, drug release, miniaturized chemical systems, etc.
Nanorobotics for NEMS Using Helical Nanostructures D. Xu, L. Zhang, B. Nelson, L. Dong Encyclopedia of nanotechnology, edited by Bharat Bhushan, 1715-1721. Dordrecht: Springer.
Dielectrophoretic Nanoassembly of Nanotubes onto Nanoelectrodes D. Xu, A. Subramanian, L. Dong, and B. Nelson Encyclopedia of nanotechnology, edited by Bharat Bhushan, 560-565. Dordrecht: Springer.
A Microfabricated and Microassembled Wireless Resonator M. Flueckiger, Z. Nagy, M. Probst, O. Ergeneman, S. Pane, and B.J. Nelson Sensors & Actuators A: Physical
Manufacturing of a Hybrid Acoustic Transmitter Using an Advanced Microassembly System M. Probst, M. Flueckiger, S. Pane, O. Ergeneman, Z. Nagy and B.J. Nelson IEEE. Trans. Indust. Electronics